全(單)波長橢圓偏光儀(SE&SWE)
   

  規格(SPECIFICATION):
          - Accuracy:
             Thickness : ±1% 12 A on 1200A thermo oxide on              silicon traceable from NIST standard
             N : ± 0.01 at 632.8nm.
          - Repeatability: (1 sigma, 5 times)
             Thickness : ± 2.5 A (3σ)
             N : ± 0.005 at 632.8 nm.

  應用(APPLICATION):
          - SOLAR CELL: AR-Coating
          - TFT-LCD: SIOx,SiNx,a-Si:H,N+a-Si,Photo              Resists,ITO Polyimide…
          - SEMI:
          - High-k:Al2O3,SiO2,Si3N4,SiNX,HfO2,Ta2O5,ZrO2
          - Low-k: SiOC,SiOF,SOG,BPSG …