反射式膜厚量測儀(SR)

   

  規格(SPECIFICATION):
          - Spectral range : 340~1040nm
          - Repeatability :± 1% For SiO2 1000A / Si 30
             times(1σ) at 632.8 nm

  應用(APPLICATION):
          - SOLAR CELL:AR-Coating
          - TFT-LCD:SIOx,SiNx,a-Si:H,N+a-Si,Photo
             Resists,ITO Polyimide…
          - LED: SIOx, SiNx,ITO…