Full Spectroscopic Reflectometer(SR)

   

  SPECIFICATION
          - Spectral range : 340~1040nm
          - Repeatability :± 1% For SiO2 1000A/Si 30 /    
             times(1σ) at 632.8 nm

  APPLICATION
          - SOLAR CELL:AR-Coating
          - TFT-LCD:SIOx,SiNx,a-Si:H,N+a-Si            
             Resists,ITO Polyimide…
          - LED: SIOx, SiNx,ITO…

 

 Product Introduction & Measurement report