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 規格（SPECIFICATION）：
- Accuracy:
Thickness : ±1% 12 A on 1200A thermo oxide on silicon
t
traceable from NIST standard
N : ± 0.01 at 632.8nm.
- Repeatability: (1 sigma, 5 times)
Thickness : ± 2.5 A （3σ）
N : ± 0.005 at 632.8 nm.
應用（APPLICATION）：
- SOLAR CELL: AR-Coating
- TFT-LCD: SIOx,SiNx,a-Si:H,N+a-si,Photo
- A-Si,Phot - Resists,ITO Polyimide…
- SEMI:
- High-k:Al2O3,SiO2,Si3N4,SiNX,HfO2,Ta2O5,ZrO2
- Low-k: SiOC,SiOF,SOG,BPSG …
產品簡介&量測報告
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